Encapsulated Silicon Nitride Nanobeam Cavity for Hybrid Nanophotonics
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: ACS Photonics
سال: 2018
ISSN: 2330-4022,2330-4022
DOI: 10.1021/acsphotonics.8b00036